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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH08330461(A)
申请公布日期
1996.12.13
申请号
JP19950133968
申请日期
1995.05.31
申请人
NEC KYUSHU LTD
发明人
SONODA KEIKO
分类号
H01L23/12;H01L23/02;H01L23/04;(IPC1-7):H01L23/04
主分类号
H01L23/12
代理机构
代理人
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