| 发明名称 |
Substrate holder and device manufacturing method |
| 摘要 |
A substrate holder to adapt a small wafer to a wafer table of a lithographic apparatus adapted to receive a larger wafer includes a plate member with a burl pattern on which the small wafer is to be placed, positioning pins to locate the small wafer and a clamp formed by a clamp ring and magnets attached to the plate member.
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| 申请公布号 |
US2005041234(A1) |
申请公布日期 |
2005.02.24 |
| 申请号 |
US20040956053 |
申请日期 |
2004.10.04 |
| 申请人 |
ASML NETHERLANDS B.V. |
发明人 |
KRIKHAAR JOHANNES WILHELMUS MARIA;VAN BEIJSTERVELDT HUBERTUS JACOBUS MARIA;MINNAERT ARTHUR WINFRIED EDUARDUS;TEUWEN MAURICE ANTON JAQUES;LOF JOERI |
| 分类号 |
G03F7/20;H01L21/027;H01L21/683;(IPC1-7):B24B1/00 |
主分类号 |
G03F7/20 |
| 代理机构 |
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