| 主权项 |
1. A micro electro mechanical system (MEMS) comprising:
a first MEMS and a second MEMS, each of the first MEMS and the second MEMS comprising:
a substrate;a membrane arranged above the substrate;a first conductor with a first plane, the first conductor being arranged between the substrate and the membrane, and the first conductor being connected to the membrane; anda second conductor with a second plane facing the first plane, the second conductor being arranged between the substrate and the membrane, and the second conductor being arranged with a gap between the first conductor and the second conductor,wherein relative positions of the first conductor and the second conductor change in a direction in which an area of the first plane facing the second plane changes, wherein the first MEMS is provided with a first reinforcing body including an opening at a part above the membrane; and wherein the second MEMS is provided with a second reinforcing body covering a part above the membrane, and wherein the first MEMS and the second MEMS are sensors configured to detect physical quantities different from each other. |
