| 摘要 |
PROBLEM TO BE SOLVED: To solve such a problem that, in a conventional advance processing, wafers to be processed in advance are divided by lot into separate housing containers beforehand by a wafer transfer machine and processed by a processor, and after the remaining wafers are processed, the previously processed wafers are returned to the original housing containers, thereby causing loss due to the wafer transfer machine and gives an influence on the progress of lot. SOLUTION: Processing can be conducted through slot designation without dividing wafers to be processed in advance in a processor, and the wafers are divided only when regeneration is needed according to an inspection result after processing. As a result, an excessive wafer transfer step can be reduced, and the progress of lot can be smoothly advanced. COPYRIGHT: (C)2005,JPO&NCIPI |
