发明名称 |
Aromatic ring-containing polymer, polymer mixture, antireflective hardmask composition, and associated methods |
摘要 |
An aromatic ring-containing polymer, a polymer mixture, an antireflective hardmask composition, and a method for patterning a material on a substrate, the aromatic ring-containing polymer including at least one aromatic ring-containing polymer represented by Formulae 1, 2, or 3.
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申请公布号 |
US2010021830(A1) |
申请公布日期 |
2010.01.28 |
申请号 |
US20090588023 |
申请日期 |
2009.10.01 |
申请人 |
KIM MIN SOO;UH DONG SEON;OH CHANG IL;YOON KYONG HO;HYUNG KYUNG HEE;LEE JIN KUK;KIM JONG-SEOB;CHEON HWAN SUNG;NAM IRINA;TOKAREVA NATALIYA |
发明人 |
KIM MIN SOO;UH DONG SEON;OH CHANG IL;YOON KYONG HO;HYUNG KYUNG HEE;LEE JIN KUK;KIM JONG-SEOB;CHEON HWAN SUNG;NAM IRINA;TOKAREVA NATALIYA |
分类号 |
G03F7/00;C08F32/08;C08L45/00;G03F1/00 |
主分类号 |
G03F7/00 |
代理机构 |
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