OPTICAL FILTER MANUFACTURING METHOD

摘要

The present invention addresses the problem of providing an optical filter manufacturing method whereby a sputter mask can be easily and accurately aligned with a workpiece, and an optical filter constituting a plurality of filter sections can be easily and accurately formed. The present invention is characterized by performing: a spacer layer film-forming step for film-forming a spacer layer 61 on a light receiving element array 15; a mask layer film-forming step for film-forming a mask layer 62 on the spacer layer 61; an opening forming step for forming a plurality of openings 33 in the mask layer 62; a part removing step for removing spacer layer 61 parts corresponding to the openings 33; and a multilayer film-growing step for vapor-growing a dielectric multilayer film 16a on the light receiving element array 15 via the mask layer 62.