摘要 |
A fluorescent x-ray spectrometer, which can be used selectably both as a wavelength-dispersion type and an energy-dispersion type, includes an irradiation chamber and a detection chamber provided with both a first detector and a second detector respectively for detecting wavelength-type and energy-type dispersion. A sample disposed in the irradiation chamber is exposed to excitation x-ray and generates fluorescent x-ray which is introduced into the detection chamber along an incident optical path defined by a Soller slit and is made incident on a dispersing element. For detecting wavelength-type dispersion, dispersed x-ray is received by the first detector. For detecting energy-type dispersion, the dispersing element is retracted from the incident optical path such that the incident x-ray from the irradiation chamber is directly received by the second detector, disposed on an extension of the incident optical path, without being dispersed by the dispersing element.
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