发明名称 STRUCTURE ANALYSIS METHOD USING ELECTROMAGNETIC WAVE GENERATED BY DISINTEGRATION OF RADIOACTIVE ISOTOPE
摘要 PURPOSE:To enable structural analysis with accuracy of nm without excitation light by arranging a radioactive isotope generating an electromagnetic wave at an atomic position of a part to be analyzed to measure an intensity distribution of the electromagnetic wave generated from the isotope. CONSTITUTION:The inside of a long and narrow sample chamber 2 surrounded with an acrylic plate is replaced with He. A sample 4 has an LB film (e.g. arachidinic acid) laminated on a flat substrate and iron arachidinate with a mass number 55 of Fe (hereinafter called as Fe55), for instance, is laminated on a layer desired to measure a distance from the substrate. The sample 4 is covered with an acrylic plate 1 containing lead so as not to detect a signal noise from the perimeter thereof. Fe55 generates characteristic X rays by trapping orbit electrons of a radioactive isotope (He so arranged as not to absorb the characteristic X rays. Changes attributed to drawing angle distribution of the intensity of the characteristic X rays can be observed with an imaging plate 5 as cycle of interference fringe. This cycle allows the determination of a distance between the Fe55 and the substrate with accuracy of nm.
申请公布号 JPH0749316(A) 申请公布日期 1995.02.21
申请号 JP19930195841 申请日期 1993.08.06
申请人 HITACHI LTD 发明人 SASAKI YUJI;SUZUKI YOSHIO;ISHIBASHI HITOSHI
分类号 G01N23/22 主分类号 G01N23/22
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