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发明名称
摘要
申请公布号	JP2627970(B2)	申请公布日期	1997.07.09
申请号	JP19900210043	申请日期	1990.08.07
申请人		发明人
分类号	H01L29/78;H01L21/265;H01L21/8242;H01L27/10;H01L27/108;(IPC1-7):H01L29/78;H01L21/824	主分类号	H01L29/78
代理机构		代理人
主权项
地址

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