发明名称 |
APPARATUS AND METHODS FOR DETECTING OVERLAY ERRORS USING SCATTEROMETRY |
摘要 |
Disclose is a combined scatterometry mark comprising a scatterometry critical dimension (CD) or profile target capable of being measured to determine CD or profile information and a scatterometry overlay target disposed over the scatterometry CD or profile target, the scatterometry overlay target cooperating with the scatterometry CD or profile target to form a scatterometry mark capable of being measured to determine overlay.
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申请公布号 |
US2008049226(A1) |
申请公布日期 |
2008.02.28 |
申请号 |
US20070926603 |
申请日期 |
2007.10.29 |
申请人 |
KLA-TENCOR TECHNOLOGIES CORPORATION |
发明人 |
MIEHER WALTER D.;LEVY ADY;GOLOVANESKY BORIS;FRIEDMANN MICHAEL;SMITH IAN;ADEL MICHAEL E.;FABRIKANT ANATOLY |
分类号 |
G01B11/00;G03F7/20;G03F9/00 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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