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发明名称
Purge and rough cryopump regeneration process cryopump and controller
摘要
申请公布号
GB9922209(D0)
申请公布日期
1999.11.17
申请号
GB19990022209
申请日期
1997.02.12
申请人
HELIX TECHNOLOGY CORPORATION
发明人
分类号
F04B37/16;F04B37/08
主分类号
F04B37/16
代理机构
代理人
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地址
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