| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical member inspection device capable of detecting an abnormal portion highly accurately by using dark field illumination, even if an optical member has a curved surface. SOLUTION: This optical member inspection device has a light source part for allowing light to enter a transmissible test object; a test optical system including the test object; a shielding diaphragm disposed between the light source part and the test optical system, on an optical path of light irradiated from the light source part; a placing means on which the test object is placed; an imaging optical system entered by light through the test optical system; an imaging means having a conjugated position relation with the test object with respect to the imaging optical system; and a position adjustment means for adjusting a relative position between the test object and the shielding diaphragm so that the optical center of the test object and the center of the shielding diaphragm are positioned approximately on the same straight line. The device has a constitution wherein each member satisfies a prescribed condition with the position adjusted by the position adjustment means. COPYRIGHT: (C)2008,JPO&INPIT
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