SENSOR AND METHOD OF MANUFACTURING SAME

摘要

A sensor comprising: a mass element; a frame surrounding the mass element; a connecting body having flexibility, and connecting the mass element to the frame; a pressure detecting unit; and an acceleration detecting unit. The mass element comprises: a main portion comprising a through-hole passing therethrough from the top surface to the bottom surface; a mounting portion connected to the top surface of the main portion, and surrounding an outer periphery of the through-hole; a first cover portion having flexibility, connected to the mounting portion and covering the through-hole; and a second cover portion, disposed on the bottom surface of the main portion, covering the through-hole, and deformable less than the first cover portion when received an external force. The pressure detecting unit is disposed on the first cover portion and configured to detect, with an electrical signal, bending in the first cover portion caused by an air pressure difference between an outside pressure and an airtight space that is defined by the main portion, the first cover portion, the second cover portion, and the mounting portion. The acceleration detecting unit is disposed on the connecting body and configured to detect, with an electrical signal, bending in the connecting body.

主权项

1. A sensor comprising:
a mass element; a frame surrounding the mass element in a top surface view; a connecting body having flexibility, and connecting the mass element to the frame; a pressure detecting unit; and an acceleration detecting unit,wherein the mass element comprises:
a main portion comprising a top surface, a bottom surface, and a through-hole passing therethrough from the top surface to the bottom surface; a mounting portion connected to the top surface of the main portion, and surrounding an outer periphery of the through-hole; a first cover portion having flexibility, connected to the mounting portion and covering the through-hole; and a second cover portion, disposed on the bottom surface of the main portion, covering the through-hole, and deformable less than the first cover portion when received an external force,wherein the pressure detecting unit is disposed on the first cover portion and configured to detect, with an electrical signal, bending in the first cover portion caused by an air pressure difference between an outside pressure and an airtight space that is defined by the main portion, the first cover portion, the second cover portion, and the mounting portion, andwherein the acceleration detecting unit is disposed on the connecting body and configured to detect, with an electrical signal, bending in the connecting body caused by an acceleration imparted on the mass element.