ROTARY COATING EQUIPMENT,申请号JP19920067284-传众专利搜索

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发明名称	ROTARY COATING EQUIPMENT
摘要
申请公布号	JPH05269425(A)	申请公布日期	1993.10.19
申请号	JP19920067284	申请日期	1992.03.25
申请人		发明人
分类号	B05C11/08;B23Q3/18;G03F7/16;G11B7/26;H01L21/027;(IPC1-7):B05C11/08	主分类号	B05C11/08
代理机构		代理人
主权项
地址

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