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发明名称
摘要
申请公布号
JP2730334(B2)
申请公布日期
1998.03.25
申请号
JP19910182783
申请日期
1991.07.24
申请人
NIPPON DENKI KK
发明人
IWATA SHIGERU
分类号
H01L21/76;H01L21/768;H01L21/8238;H01L23/522;H01L27/08;H01L27/092;H01L29/41;(IPC1-7):H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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