| 摘要 |
In this invention, an ion milling process and an electron microscopy observation are performed iteratively using an electron microscope equipped with an ion milling device to acquire a three-dimensional reconstruction image. Preferably, processing depth information for successive ion milling image cross sections is modified according to such conditions as the eroding rate of the ion milling process. In addition, preferably, the processing depth information is calibrated on the basis of an eroding rate obtained by subjecting a calibration sample to the ion milling process. In this manner, on the basis of highly accurate processing depth information and successive ion milling images with no visual field deviation, a highly accurate three-dimensional reconstruction image can be acquired for a wide region, which is difficult by FIB/SEM tomography method, or the like. |
