MICRO ACTUATOR FOR INK-JET PRINTER HEAD USING MULTILAYERED SHAPE-MEMORY ALLOY AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: A micro actuator for an ink-jet printer head using multilayered shape-memory alloy and a method for the same are provided to improve fatigue phenomenon according to the repeated use, thereby improving repetitive mechanic characteristic and equally maintaining vibration characteristic as the actuator. CONSTITUTION: A method for manufacturing a micro actuator for an ink-jet printer head using multilayered shape-memory alloy includes the steps of supplying a silicon substrate(20), forming an insulating film(22a) on the surface of the silicon substrate, forming a shape-memory alloy layer(24a) on the top of the insulating film, forming multilayered insulating films and the shape-memory alloy layers by repeating steps of forming the insulating and the shape-memory alloy layer, giving a shape-memory property on the shape-memory alloy layer by heat-treating, and forming a lower space part(26) by etching the silicon substrate.