CHARGED PARTICLE BEAM DEVICE AND SCANNING ELECTRON MICROSCOPE

摘要

Provided is a charged particle beam device in which a simple configuration can be employed as a detection unit for detecting signal electrons emitted from a sample. The charged particle beam device is provided with: a charged particle source (11); an acceleration power supply (14) which is connected to the charged particle source (11), and which is provided in order to accelerate a charged particle beam (12) emitted from the charged particle source (11); and an objective lens (26) which focuses the charged particle beam (12) on a sample (23). The objective lens (26) is disposed at the side of the sample (23) opposite to the side on which the charged particle beam (12) is incident. The charged particle beam device is configured from: an upper device which emits the charged particle beam (12) towards the sample (23); a lower device on which the sample (23) is held; and a detector (20) which detects signal electrons (21) emitted from the sample (23) as a result of the charged particle beam (12). The upper device is provided with an aperture (18c). The charged particle beam (12), having passed through the inside of the upper device, is ultimately emitted from the aperture (18c). The detector (20) is provided in a space which does not include the upper device and the lower device.