| 摘要 |
<p>PURPOSE:To provide an ultrasonic cleaner capable of surely cleaning the entire surface of a material to be cleaned with respect to the cleaner for cleaning the surface of a planar material such as an exposure mask dipped in the soln. in a cleaning tank. CONSTITUTION:This ultrasonic cleaner has a vibrator 12 for emitting an ultrasonic wave U to a cleaning soln. 31 in a cleaning tank 1. In this cleaner, the vibrating face 12a of the vibrator 12 is oriented in the depth direction of the soln. 31 in the tank 1.</p> |
