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发明名称
MASS FLOW CONTROLLER
摘要
申请公布号
JPH04262408(A)
申请公布日期
1992.09.17
申请号
JP19910022523
申请日期
1991.02.18
申请人
NEC CORP
发明人
SASAHARA KATSUYUKI
分类号
F23N5/18;G05D7/06
主分类号
F23N5/18
代理机构
代理人
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