| 摘要 |
PROBLEM TO BE SOLVED: To reduce vibration of a vacuum pump system and inside the vacuum pump system. SOLUTION: In the pump system 400 equipped with an active magnetic bearing 490, the magnetic bearing 490 induces vibration in anti-phase with an unwanted vibration so that the total vibration in the pump system 400 is reduced. Due to this, the magnetic bearing 490 in one pump 410 can cancel vibration from another pump 430. COPYRIGHT: (C)2005,JPO&NCIPI
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