摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the humidity dependence of a CO<SB>2</SB>sensor and to shorten the stabilizing time of the CO<SB>2</SB>sensor at the time of restarting from a room temperature. <P>SOLUTION: A detection electrode 8 and a counter electrode 12 are connected to an NASICON film 6 and the counter electrode 12 is constituted of BiMeVOx films 14 and 18 and the perovskite-BiMeVOx mixture film 16 between both films 14 and 18. <P>COPYRIGHT: (C)2007,JPO&INPIT |