| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angle measuring method for a holding head suitable for measuring accurately and easily an angle formed by a holding face of the holding head and a substrate stage under a condition near to an actual using condition. <P>SOLUTION: A suction face of a vacuum suction head 1 is brought into contact with an upper face of a parallel prism 9, and light is made incident from a short wavelength coaxial illumination 12 into the parallel prism 9. An interference fringe formed of light reflected on the upper face out of the light incident into the parallel prism 9, and light transmitted through the upper face and reflected on the suction face is measured by a CCD camera 11. A parallelism θ of the suction face of the vacuum suction head 1 to the substrate stage 2 is accurately measured thereby based on a state of the interference fringe. <P>COPYRIGHT: (C)2007,JPO&INPIT |
