SPUTTERING TARGET AND MEANS FOR COOLING THE TARGET

摘要

A sputtering target comprising an outer target tube (14), an inner support tube (22) supporting a magnet carrier (24) extending along substantially the entire length of the inner support tube? and a water cooling circuit including at least one passageway within the inner support tube with an inlet at one end thereof adapted to receive cooling water from an external source, at least one outlet aperture at an opposite end thereof opening to a cooling chamber radially between the inner support tube and the outer target tube; and a plurality of spiral vane segments (50, 52) attached to an outer surface of the inner support tube.