发明名称 プローブカード、及び検査装置
摘要 Provided is a probe card capable of effectively placing electronic parts. A probe card according to the present invention includes a plurality of probes that come into contact with a plurality of electrodes of a device, a probe board including the plurality of probes provided thereon, a wiring board that is placed facing a surface of the probe board opposite to a surface including the probes provided thereon, a connector that includes a connection pin and a holder, in which the connection pin electrically connects a line of the probe board and a line of the wiring board, and the holder holds the connection pin between the probe board and the wiring board, and a first electronic part that is mounted on a probe board side surface of the wiring board and placed in a mounting space formed by a through hole or a recess provided in the holder.
申请公布号 JP5947647(B2) 申请公布日期 2016.07.06
申请号 JP20120165041 申请日期 2012.07.25
申请人 株式会社日本マイクロニクス 发明人 三國 勝志;菊地 義徳;大沼 義人;工藤 俊之
分类号 G01R1/073;G01R1/067;G01R31/26;G01R31/28;H01L21/66 主分类号 G01R1/073
代理机构 代理人
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