| 摘要 |
PROBLEM TO BE SOLVED: To prevent a fire on the outside of a system from spreading into the system through an exhaust path and a fire in the system from spreading entirely over a factory by providing the exhaust path for exhausting the atmosphere in a processing chamber to the outside of the system and means for closing the exhaust path in case of an emergency. SOLUTION: When a fire takes place in a resist coating/developing system and detected by fire alarms 13-15 in the system, a detection signal is delivered to a control section 104. Consequently, the control section 104 lights an alarm lamp 11 and transmits a closing signal to closing mechanisms 96, 97 which close exhaust paths 94, 95. According to the arrangement, fire in the resist coating/developing system can be prevented from spreading through the exhaust paths 94, 95, 105. |
