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发明名称
Vorrichtung für Mikrowellen-Plasma-CVD.
摘要
申请公布号
DE69110514(D1)
申请公布日期
1995.07.27
申请号
DE1991610514
申请日期
1991.03.19
申请人
NEW JAPAN RADIO CO. LTD., TOKIO/TOKYO, JP
发明人
TAKAMURA, FUMIO, KAMIFUKUOKA-SHI, SAITAMA-KEN, JP
分类号
H01L21/205;C23C16/511;H01J37/32;H01L21/31;(IPC1-7):C23C16/50
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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