发明名称 Through-wafer interconnects for photoimager and memory wafers
摘要 A through-wafer interconnect for imager, memory and other integrated circuit applications is disclosed, thereby eliminating the need for wire bonding, making devices incorporating such interconnects stackable and enabling wafer level packaging for imager devices. Further, a smaller and more reliable die package is achieved and circuit parasitics (e.g., L and R) are reduced due to the reduced signal path lengths.
申请公布号 US7300857(B2) 申请公布日期 2007.11.27
申请号 US20040932296 申请日期 2004.09.02
申请人 MICRON TECHNOLOGY, INC. 发明人 AKRAM SALMAN;WATKINS CHARLES;HIATT MARK;HEMBREE DAVID;WARK JAMES;FARNWORTH WARREN;TUTTLE MARK;RIGG SIDNEY;OLIVER STEVEN;KIRBY KYLE;WOOD ALAN;VELICKY LU
分类号 H01L21/441 主分类号 H01L21/441
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