| 摘要 |
PROBLEM TO BE SOLVED: To provide a quartz glass implement having a uniform, highly precise and reproducible fine projecting and recessed surface while suppressing the occurrence of the new particle generation cause due to a surface treatment. SOLUTION: The fine projecting and recessed surface is formed on the surface of a quartz glass plate by focusing carbon dioxide laser beam from a laser processing apparatus 1 using a multi-articulated arm robot 3 on the surface of the quartz glass plate 2 and moving the laser beam at a speed previously obtained by a relation between the speed and surface roughness Ra in a range of 0.5-50 μm to form prescribed surface roughness. The fine projecting and recessed layer having the desired surface roughness is formed on the surface by the irradiation with the carbon dioxide laser. COPYRIGHT: (C)2008,JPO&INPIT |
