| 发明名称 |
PROCESSING APPARATUS |
| 摘要 |
In accordance with one or more aspects of the disclosed embodiment a semiconductor processing apparatus is provided. The semiconductor processing apparatus includes a frame forming a sealable chamber having a longitudinal axis and lateral sides astride the longitudinal axis, the sealable chamber being configured to hold a sealed environment therein, at least one transport module mounted to the sealable chamber and having a telescoping carriage being configured so that the telescoping carriage is linearly movable relative to another portion of the transport module where the telescoping carriage and the other portion define a telescoping motion along the longitudinal axis, and at least one transfer robot mounted to the carriage, each of the at least one transfer robot having at least one transfer arm configured for holding a substrate thereon. |
| 申请公布号 |
US2016293467(A1) |
申请公布日期 |
2016.10.06 |
| 申请号 |
US201415103268 |
申请日期 |
2014.10.16 |
| 申请人 |
Brooks Automation, Inc. |
发明人 |
CAVENEY Robert T.;GILCHRIST Ulysses |
| 分类号 |
H01L21/677;H01L21/67 |
主分类号 |
H01L21/677 |
| 代理机构 |
|
代理人 |
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| 主权项 |
1. A semiconductor processing apparatus comprising:
a frame forming a sealable chamber having a longitudinal axis and lateral sides astride the longitudinal axis, the sealable chamber being configured to hold a sealed environment therein; at least one transport module mounted to the sealable chamber and having a telescoping carriage being configured so that the telescoping carriage is linearly movable relative to another portion of the transport module where the telescoping carriage and the other portion define a telescoping motion along the longitudinal axis; and at least one transfer robot mounted to the carriage, each of the at least one transfer robot having at least one transfer arm configured for holding a substrate thereon. |
| 地址 |
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