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发明名称
SEMICONDUCTOR DEVICE TESTER
摘要
申请公布号
JPH1130645(A)
申请公布日期
1999.02.02
申请号
JP19980128696
申请日期
1998.05.12
申请人
ADVANTEST CORP
发明人
HAYAMA HISAO;GOTO TOSHIO;SUGANO YUKIO
分类号
G01R31/26;(IPC1-7):G01R31/26
主分类号
G01R31/26
代理机构
代理人
主权项
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