EVALUATION METHOD OF ORGANIC OR BIO- CONJUGATION ON NANOPARTICLES USING IMAGING OF TIME-OF-FLIGHT SECONDARY ION MASS SPECTROMETRY

摘要

A method for evaluating bond between materials through imaging of time-of-flight secondary ion mass spectrometry(TOF-SIMS) is provided to evaluate the bond between organic, inorganic or bio material with nanoparticle and perform quantitative and qualitative analysis. A method for evaluating bond between materials using time-of-flight secondary ion mass spectrometry(TOF-SIMS) comprises: a step of forming the pattern of nanoparticle which is bonded with bio, organic or inorganic material on a substrate; a step of measuring the ion detection pattern of bond between nanoparticle and bond material on the substrate using the TOF-SIMS; and a step of comparing detection pattern of bio, organic or inorganic material and nanoparticle and determining the bond between bio, organic or inorganic material with nanoparticle.