SALT, ACID GENERATOR, RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN

摘要

A salt represented by formula (I):;;wherein R1 and R2 independently represent a hydrogen atom, a hydroxy group or a C1 to C12 hydrocarbon group in which a methylene group may be replaced by a —O— or —CO—; m and n independently represent 1 or 2; Ar represents an optionally substituted phenyl group; Q1 and Q2 independently represent a fluorine atom or a C1 to C6 perfluoroalkyl group, A1 represents a single bond, a C1 to C24 alkanediyl group or the like, and Y represents an optionally substituted C1 to C18 alkyl group or monovalent C3 to C18 alicyclic hydrocarbon group, and a methylene group therein may be replaced by a —O—, O— or —SO2—, provided that the alkyl group or the alicyclic hydrocarbon group has at least one substituent, or at least one methylene group contained therein is replaced by a —O—, —CO— or —SO2—.

主权项

1. A salt represented by formula (I): wherein R1 and R2 each independently represent a hydrogen atom, a hydroxy group or a C1 to C12 hydrocarbon group in which a methylene group may be replaced by an oxygen atom or a carbonyl group; m and n each independently represent 1 or 2; Ar represents an optionally substituted phenyl group; Q1 and Q2 each independently represent a fluorine atom or a C1 to C6 perfluoroalkyl group, A1 represents a single bond, a C1 to C24 alkanediyl group or *-A2-X1-(A3-X2)a-(A4)b, * represents a binding site to a carbonyl group; A2, A3 and A4 each independently represent a C1 to C6 alkanediyl group, X1 and X2 each independently represent —O—, —CO—O— or —O—CO—, a represents 0 or 1, b represents 0 or 1, and Y represents a hydrogen atom or a monovalent C3 to C18 alicyclic hydrocarbon group where a hydrogen atom may be replaced by a substituent and where a methylene group may be replaced by an oxygen atom, a carbonyl group or a sulfonyl group, provided that the alicyclic hydrocarbon group has a substituent, or a methylene group contained in the alicyclic hydrocarbon group has been replaced by an oxygen atom, a carbonyl group or a sulfonyl group.