IRREGULAR PATTERN FORMING METHOD, IRREGULAR PATTERN FORMING DEVICE AND METHOD OF MANUFACTURING INFORMATION RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To highly accurately and easily transfer an irregular pattern to a resin layer without incurring breakage and deterioration of a substrate and reduction of throughput. SOLUTION: When a stamper side irregular pattern is transferred to the resin layer 30 to form the irregular pattern on a working object 10 by performing pushing treatment pushing a stamper 20 formed with the stamper side irregular pattern to the resin layer 30 on the working object 10 (base material) and peeling treatment peeling the stamper 20 whose projected part 26a of the stamper side irregular pattern is pushed in the resin layer 30 by the pushing treatment from the resin layer 30 in this order, pressure reducing treatment is executed so that ambient pressure (pressure in a vacuum chamber)of the resin layer 30 in such a state that pushing of the projected part 26a is completed (at a prescribed time point between a time point t4 and a time point t5) is made to be lower than that at a time point t2 at which the projected part 26a comes in contact with the resin layer 30 at pushing treatment. COPYRIGHT: (C)2007,JPO&INPIT