发明名称 POSITIVE PHOTOSENSITIVE COMPOSITION
摘要 <P>PROBLEM TO BE SOLVED: To provide a positive photosensitive composition which requires no burning, makes it possible to obtain necessary and sufficient adhesion when it is applied under a humidity of 2-60%, can be developed at a low alkali intensity, makes it possible to carry out development with keeping high sensitivity while forming no residue, ensures sharp edges, can provide a very hard resist film, and is improved in scratch resistance in the handling before development. <P>SOLUTION: The positive photosensitive composition comprises, as essential components, (A) a high molecular substance having at least one carboxyl group in a molecule, (B) a photo-thermal conversion material that absorbs infrared rays from an image exposure light source to convert them into heat, and a specific resin. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008070901(A) 申请公布日期 2008.03.27
申请号 JP20070285369 申请日期 2007.11.01
申请人 THINK LABORATORY CO LTD 发明人 SATO TSUTOMU
分类号 G03F7/004;G03F7/039;H01L21/027 主分类号 G03F7/004
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