摘要 |
PROBLEM TO BE SOLVED: To provide a light alignment device and a light alignment method capable of improving productivity and further enhancing quality in light alignment processing.SOLUTION: A substrate S is mounted on each of two stages 21 and 22 and made to pass through a radiation range R on which polarization light is radiated by an irradiation unit 1 and the two stages 21 and 22 are made to reciprocate alternately by a stage movement mechanism 3. A control unit for controlling the stage movement mechanism 3 maintains constant set passage speed that is slow speed when each of the stages 21, 22 passes through the radiation range R. Regarding movement between a first substrate recovery position and the radiation range R of the first stage 21 and movement between a second substrate recovery position and the radiation range R of the second stage 22, the control unit performs movement at a set conveyance speed that is fast speed.SELECTED DRAWING: Figure 1 |