CONTROL OF STATIC ELECTRICITY IN MICRO-ELECTRONIC FABRICATION

摘要

An electrostatic grounding strap (12) with at least two elements (26, 28) for making electrical contact with a wearer's skin is disclosed. The sufficiency of contact is measured via the skin resistance between the contacts. When sufficiently depressed, the electrical circuitry within the strap (30) is powered. The circuitry determines the status of a plurality of ground conditions and signals them via an RF transmitter mounted on the strap to a central monitoring unit (16).