Integrated optical modulator and method for manufacturing the same

摘要

An integrated optical modulator and method for manufacturing thereof are disclosed. The integrated optical modulator comprises a carrier wave band modulator using a double sideband modulation method and an intermediate frequency band modulator using a single sideband modulation method. The carrier wave band modulator and the intermediate frequency band modulator are connected in series. A method for manufacturing an integrated optical modulator comprises preparing a substrate having at least one polarization reversed section, forming a first optical waveguide part and a second optical waveguide part on the substrate, forming a buffer layer over the first and second optical waveguide parts, forming sequentially a first electrode part and a second electrode part over the first optical waveguide part, and forming a third electrode part over the second optical waveguide part.