| 摘要 |
<P>PROBLEM TO BE SOLVED: To increase both a mechanical quality coefficient and an electromechanical coupling coefficient. <P>SOLUTION: In a resonator, a piezoelectric thin-film layer 3 is composed by laminating a piezoelectric thin film 30 that is formed by AlN as a first layer and a piezoelectric thin film 31 that is formed by PZT as a second layer, and is interposed between lower and upper electrodes 20, 40 in a thickness direction, thus composing the piezoelectric thin-film layer 3 by laminating a plurality of piezoelectric thin films 30, 31 formed by a plurality of kinds of piezoelectric materials (AlN, PZT), where the relationship of the polarizability differs from that of the mechanical quality coefficient, and hence increasing both the mechanical quality coefficient and the electromechanical coupling coefficient as compared with when the piezoelectric film is composed of a single piezoelectric material. <P>COPYRIGHT: (C)2008,JPO&INPIT |
