MEMS-based rapidscan device and projector having same

摘要

A device projecting images by micro electro-mechanical system (MEMS) technology mirrors includes a base, a first substrate, a first reflective mirror, a second substrate, and a second reflective mirror. The first substrate and the second substrate are adjacently positioned on the base. The first reflective mirror is formed on the first substrate by a micro electro-mechanical system (MEMS) technology and configured for receiving a light beam and rotating in two directions under control of the MEMS for reflect the received light in two directions. The second reflective mirror is formed on the rotatable second substrate to receive the image and be rotated, thus further adjusting the range of the projected images.

主权项

1. A rapidscan device, comprising:
a base; a first substrate positioned on the base; a first reflective mirror formed on the first substrate by a micro electro-mechanical system (MEMS) technology and configured for receiving a light beam and rotating in two direction under control of the MEMS for reflect the light beam to scanning in two direction to form a modulated light beam in a range; a second substrate positioned on the base, adjacent to the first substrate, and a second reflective mirror formed on the second substrate and substantially facing the first reflective mirror to receive the modulated light beam, the second substrate driving the second reflective mirror to rotate, thus adjusting a direction of the modulated light beam reflected off the second reflective mirror.