Pattern irradiation apparatus having spatial light modulator and light blocking member for blocking 0-order light generated by spatial light modulator

摘要

A pattern irradiation apparatus includes a light source unit, an objective, a spatial light modulator, a light blocking member, and a control device. The objective irradiates a sample plane with light emitted from the light source unit. The spatial light modulator is of a phase modulation type and is arranged at a position conjugate with a pupil position of the objective and modulates a phase of the light emitted from the light source unit. The light blocking member is arranged in an optical path between the spatial light modulator and the objective and is configured to block 0-order light generated by the spatial light modulator. The control device makes a correspondence between a focusing position of the 0-order light generated by the spatial light modulator and a position of the light blocking member.

主权项

1. A pattern irradiation apparatus comprising:
a light source unit; an objective that irradiates a sample plane with light emitted from the light source unit; a spatial light modulator of a phase modulation type that is arranged at a position conjugate with a pupil position of the objective and that modulates a phase of the light emitted from the light source unit; a light blocking member that is arranged in an optical path between the spatial light modulator and the objective and that is configured to block 0-order light generated by the special light modulator; and a control device that makes a correspondence between a focusing position of the 0-order light generator by the spatial light modulator and a position of the light blocking member, wherein the control device controls a phase modulation pattern of the spatial light modulator so that a correspondence is made between the focusing position of the 0-order light generated by the spatial light modulator and the position of the light blocking member.