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摘要
申请公布号
JPH06103712(B2)
申请公布日期
1994.12.14
申请号
JP19890212813
申请日期
1989.08.18
申请人
发明人
分类号
H01L21/66;G01R31/26;(IPC1-7):H01L21/66
主分类号
H01L21/66
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