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发明名称
摘要
申请公布号	JPH06103341(B2)	申请公布日期	1994.12.14
申请号	JP19880273242	申请日期	1988.10.31
申请人		发明人
分类号	G01R33/07;G01R33/06;H01L43/06;(IPC1-7):G01R33/06	主分类号	G01R33/07
代理机构		代理人
主权项
地址

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