发明名称 |
Control and testing of a micro electromechanical switch |
摘要 |
A circuit includes a micro electro mechanical switch and a detection circuit. The micro electro mechanical switch has a movable portion positioned to form an electrical connection between a first electrical contact and a second electrical contact in response to an electrostatic force provided by a top activation electrode and a bottom activation electrode. The detection circuit is electrically coupled to the top and bottom activation electrodes and is for detecting a first capacitance value between the top and bottom activation electrodes when the movable portion is in a first position and for detecting a second capacitance value when the movable portion is in a second position. By detecting a change in the capacitance, it can be determined if the switch is open or closed.
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申请公布号 |
US7479785(B2) |
申请公布日期 |
2009.01.20 |
申请号 |
US20060465311 |
申请日期 |
2006.08.17 |
申请人 |
FREESCALE SEMICONDUCTOR, INC. |
发明人 |
LIU LIANJUN;GOGOI BISHNU P. |
分类号 |
G01R31/00 |
主分类号 |
G01R31/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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