| 摘要 |
PROBLEM TO BE SOLVED: To provide a dust removing member which can remove simply and certainly a foreign matter adhered in a substrate processing apparatus by improving conveyance operability into the substrate processing apparatus. SOLUTION: The dust removing member of the substrate processing apparatus includes a dust removing layer containing an acrylic polymer which contains a (meth)acrylic acid alkyl ester having a straight chain alkyl group including 16 or more carbons in a side chain as an indispensable monomer component as a base component. Particularly, a conveying member with a dust removing function is obtained by laminating a dust removing sheet including a dust removing layer provided on one side surface of a support, and the dust removing sheet of the above configuration on the conveying member with the dust removing layer disposed at its outside. COPYRIGHT: (C)2005,JPO&NCIPI
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