| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for measuring size of a multi-imaging head type, capable of performing stable size measurement by automatically performing matching parameters, including offset of measured values (each optical system) for each head, when creating a recipe. SOLUTION: The device for measuring size of the multi-imaging head time with a plurality of imaging heads that is provided with an optical microscope includes recipe creation parts 20, 24 for creating measurement recipes for each imaging head by optimizing the parameters, including the offset value of the measured values due to each imaging head so that the measured values of patterns measured, based on image signals obtained by being imaged with the optical microscope of each imaging head, by using the same specimen to be measured are the same between the imaging head. COPYRIGHT: (C)2008,JPO&INPIT
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