| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high-sensitivity solid-state imaging apparatus which copes with an optical system, having a short focal length (optical system, having a large incident angle θ). <P>SOLUTION: Each pixel (2.8 mm square in size) includes a distributed refractive index lens 1, a color filter 2 for G, Al wirings 3, an electrical signal transmitting unit 4, a planarized layer 5, a light-receiving element (Si photodiode) 6, and an Si substrate 7. The concentric circle structure for the distributed refractive index lens is made of four types of materials, having different refractive indexes, such as, TiO<SB>2</SB>(n=2.53), SiN (n=2.53), SiO<SB>2</SB>(n=2.53), and air (n=1.0), and the radial difference of the outer peripheries of adjacent circular light-transmitting films is 100 nm. Furthermore, the film thickness is 0.4 μm. <P>COPYRIGHT: (C)2009,JPO&INPIT |
