| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable control reflecting a lighting status of plasma in a plasma generator used for workpiece processing such as reforming of a substrate. <P>SOLUTION: A protection tube 36 comprising a silica glass pipe for corrosion resistance is attached at a tip of a plasma generating nozzle 31, a thermocouple 38 is attached on an outer peripheral surface of the protection tube 36, a start-up voltage is input to a whole control part 90 with analog/digital conversion by a sensor input part 98, and a flow control valve 923 of processing gas carries out feedback control. Therefore, the control reflecting a lighting status of plasma can be provided, and a stable plume P can be obtained. <P>COPYRIGHT: (C)2007,JPO&INPIT |
