APPARATUS FOR SURFACE TREATMENT USING FLUORINE GAS

摘要

PROBLEM TO BE SOLVED: To provide a simple apparatus for the surface treatment of a plastic product and the like with fluorine gas. SOLUTION: This apparatus is mainly composed of a gas-preparing tank 6 equipped with at least a fluorine gas-supplying pipe and a nitrogen gas- supplying pipe connected with respective gas resources, a treating tank 11 connected to the gas-preparing tank by a gas conduit and equipped with an opening capable of being tightly closed, and an exhaust gas-treating apparatus equipped with an active alumina bed for adsorbing at least fluorine gas.