发明名称 |
Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus |
摘要 |
An apparatus for manufacturing a magnetic recording disk includes a magnetic-film deposition chamber in which a magnetic film for a recording layer is deposited on a substrate; a lubricant-layer preparation chamber in which a lubricant layer is prepared on the substrate in vacuum; and a cleaning chamber in which the substrate is cleaned in vacuum after the magnetic-film deposition in the magnetic-film chamber and before the lubricant-layer preparation in the lubricant-layer chamber. The apparatus may further include a transfer system that transfers the substrate from the cleaning chamber to the lubricant-layer preparation chamber without exposing the substrate to the atmosphere.
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申请公布号 |
US2008216744(A1) |
申请公布日期 |
2008.09.11 |
申请号 |
US20080037021 |
申请日期 |
2008.02.25 |
申请人 |
CANON ANELVA CORPORATION |
发明人 |
WATANABE NAOKI;WATANABE NOBUYOSHI;TANI KAZUNORI;FURUKAWA SHINJI;SASAKI HIROMI;WATABE OSAMU |
分类号 |
C23C16/00;G11B5/84 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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